PLASMA PROCESSING DEVICE,申请号KR20067002758-传众专利搜索

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发明名称	PLASMA PROCESSING DEVICE
摘要
申请公布号	KR100824813(B1)	申请公布日期	2008.04.23
申请号	KR20067002758	申请日期	2006.02.09
申请人		发明人
分类号	H01L21/205;H05H1/46;C23C16/511;H01J37/32;H01L21/304	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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