发明名称 |
Force rebalancing and parametric amplification of MEMS inertial sensors |
摘要 |
MEMS devices and methods for measuring Coriolis forces using force rebalancing and parametric gain amplification techniques are disclosed. A MEMS inertial sensor can include one or more proof masses, at least one sense electrode positioned adjacent to each proof mass, a number of torquer electrodes for electrostatically nulling quadrature and Coriolis-related proof mass motion, and a number of torquer electrodes for producing a pumping force on the proof masses. Force rebalancing voltages can be applied to some torquer electrodes to electrostatically null quadrature and/or Coriolis-related proof mass motion along a sense axis of the device. A pumping voltage at approximately twice the motor drive frequency of the proof masses can be used to pump the proof masses along the sense axis for increasing scale factor. |
申请公布号 |
EP1914512(A2) |
申请公布日期 |
2008.04.23 |
申请号 |
EP20070118534 |
申请日期 |
2007.10.15 |
申请人 |
HONEYWELL INTERNATIONAL, INC. |
发明人 |
JOHNSON, BURGESS R.;CABUZ, EUGEN I. |
分类号 |
G01C19/56 |
主分类号 |
G01C19/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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