发明名称 GALLIUM NITRIDE WAFER
摘要 A gallium nitride wafer (11) has a substantially circular shape. The gallium nitride wafer (11) is provided with a plurality of stripe regions (13), a plurality of single crystal regions (15) and a visible mark (17). Each stripe region (13) exhibits a direction of axis and extends in a direction of a prescribed axis. Each stripe region (13) is sandwiched between the single crystal regions (15). The mark (17) is arranged at least on a front plane (11a) or a rear plane (11b) of the gallium nitride wafer (11), and has visible size and shape. The dislocation density of the stripe region (13) is higher than that of the single crystal region (15), and the crystal orientation of the stripe region (13) is different from that of the single crystal region (15).
申请公布号 KR20080035422(A) 申请公布日期 2008.04.23
申请号 KR20067021612 申请日期 2006.10.18
申请人 SUMITOMO ELECTRIC INDUSTRIES, LTD. 发明人 NAKAYAMA MASAHIRO
分类号 H01L21/20;C30B25/04;C30B29/38 主分类号 H01L21/20
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