发明名称 |
Optical system having an optical element that can be brought into at least two positions |
摘要 |
There is provided an optical system including an optical element having a first used area and a second used area on which impinge rays of a light bundle, and a device for moving the optical element between a first position and a second position. The light bundle impinges on the first used area when the optical element is in the first position, and light bundle impinges on the second used area when the optical element is in the second position.
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申请公布号 |
US7362414(B2) |
申请公布日期 |
2008.04.22 |
申请号 |
US20050065327 |
申请日期 |
2005.02.24 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
SINGER WOLFGANG;HAINZ JOACHIM;WIETZORREK JOACHIM;WEISS MARKUS |
分类号 |
G03B27/52;G21K1/06;G02B7/00;G02B17/06;G02B27/00;G03B27/42;G03F7/20;H01L21/027 |
主分类号 |
G03B27/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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