发明名称 Method of forming a metal line and method of manufacturing display substrate having the same
摘要 A method of forming a metal line is provided. A first metal layer and a second metal layer protecting the first metal layer are formed on a base substrate. The first metal layer includes aluminum or aluminum alloy. A photoresist pattern having a linear shape is formed on the second metal layer. The first and second metal layers are dry-etched using etching gas and the photoresist pattern as an etching mask. An etching material is removed from the base substrate, to prevent corrosion of the dry-etched first metal layer. Therefore, the source metal pattern without corrosion may be formed through a dry-etching process so that a manufacturing cost is decreased.
申请公布号 US7361606(B2) 申请公布日期 2008.04.22
申请号 US20060564308 申请日期 2006.11.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM SANG GAB;KIM SHI YUL;OH MIN SEOK;CHIN HONG KEE
分类号 H01L21/302 主分类号 H01L21/302
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