| 摘要 |
A supporting pin, a substrate supporting unit, and a substrate cleaning apparatus having the same are provided to prevent a breakdown of a substrate by reducing a contact shock between a supporting pin and the substrate. A connection part(23) is connected to a body part(21). A shock absorbing part(25) is arranged at one end of the connection part. The shock absorbing part is formed to reduce a shock due to a contact with the substrate. A hole is formed at the body part and the connection part. An elastic member(27) is connected through the hole to the shock absorbing part to reduce the shock to the shock absorbing part. The shock absorbing part has a shape of ball. A contact portion of the shock absorbing part has a round shape. The contact portion of the shock absorbing part comes in contact with the substrate.
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