Low walk-off interferometer

摘要

An interferometer can achieve a high dynamic range for measurements along vertical and horizontal directions using a first measurement channel providing a high dynamic range measurement of a path including components respectively parallel and perpendicular to the optics-object separation and a second measurement channel providing a high dynamic range measurement with just a perpendicular component. Further, using the same techniques at multiple locations around permits a high dynamic range for measurements of the degrees of freedom of an object.