发明名称 |
Compositions and methods for drop boundary detection and radiation beam alignment |
摘要 |
The invention provides an apparatus and method for determining the position of a radiation beam. The apparatus includes (a) a first reflective surface and a second reflective surface, the reflective surfaces being placed to form the reflective exterior of a wedge; (b) a first detector placed to detect radiation reflected from the first reflective surface, and (c) a second detector placed to detect radiation reflected from the second reflective surface. The method includes the steps of (a) directing a radiation beam to the reflective exterior of a wedge formed by a first reflective surface and a second reflective surface; (b) selectively detecting radiation reflected from the first reflective surface; (c) selectively detecting radiation reflected from the second reflective surface; and (d) determining the position of the radiation beam based on the difference in the amount of radiation detected from each surface.
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申请公布号 |
US7362424(B2) |
申请公布日期 |
2008.04.22 |
申请号 |
US20020132659 |
申请日期 |
2002.04.24 |
申请人 |
THE INSTITUTE FOR SYSTEMS BIOLOGY |
发明人 |
VAN DEN ENGH GERRIT J.;NELSON PETER I. |
分类号 |
G01B9/02;G01N15/14 |
主分类号 |
G01B9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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