| 发明名称 |
Method of making a haze free, lead rich PZT film |
| 摘要 |
An embodiment of the invention is a method of fabricating a haze free, phase pure, PZT layer, 3 , where a lead rich PZT film, 102 , is formed over a phase pure stoichiometric PZT film, 101.
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| 申请公布号 |
US7361949(B2) |
申请公布日期 |
2008.04.22 |
| 申请号 |
US20050046568 |
申请日期 |
2005.01.28 |
| 申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
AGGARWAL SANJEEV;TAYLOR KELLY J. |
| 分类号 |
C01G25/00;H01L29/76;C23C16/40;H01L21/02;H01L21/314;H01L21/316;H01L21/8246;H01L27/105 |
主分类号 |
C01G25/00 |
| 代理机构 |
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| 主权项 |
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