Linear motor, exposure apparatus using the same, and device manufacturing method

摘要

In a movable magnet-type linear motor including a stator having a plurality of iron core elements arranged at a certain slot pitch and a movable part having a magnet 3 which is movable in an arrangement direction one or more pseudo-slots are provided between adjacent slots, and the iron core element and the magnet are relatively skewed by an approximately apparent slot pitch including the pseudo-slot.