发明名称 |
Method for fabricating cliche and method for forming pattern using the same |
摘要 |
A method for fabricating a cliché including: providing a transparent glass substrate; depositing a metal layer on the substrate; patterning the metal layer and thereby forming a first metal pattern; etching the glass substrate by using the first metal pattern as a mask and thereby forming a first convex pattern; patterning the first metal pattern and thereby forming a second metal pattern; and etching the first convex pattern by using the second metal pattern as a mask and thereby forming a second convex pattern.
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申请公布号 |
US7361285(B2) |
申请公布日期 |
2008.04.22 |
申请号 |
US20050114107 |
申请日期 |
2005.04.26 |
申请人 |
LG.PHILIPS LCD CO., LTD. |
发明人 |
KIM CHUL-HO |
分类号 |
C23F1/00;G03F7/40;B44C1/22;C03C15/00;G02F1/133;G02F1/1333;G02F1/136;G02F1/1362;G03F7/20;H01L21/027 |
主分类号 |
C23F1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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