发明名称 Method for fabricating cliche and method for forming pattern using the same
摘要 A method for fabricating a cliché including: providing a transparent glass substrate; depositing a metal layer on the substrate; patterning the metal layer and thereby forming a first metal pattern; etching the glass substrate by using the first metal pattern as a mask and thereby forming a first convex pattern; patterning the first metal pattern and thereby forming a second metal pattern; and etching the first convex pattern by using the second metal pattern as a mask and thereby forming a second convex pattern.
申请公布号 US7361285(B2) 申请公布日期 2008.04.22
申请号 US20050114107 申请日期 2005.04.26
申请人 LG.PHILIPS LCD CO., LTD. 发明人 KIM CHUL-HO
分类号 C23F1/00;G03F7/40;B44C1/22;C03C15/00;G02F1/133;G02F1/1333;G02F1/136;G02F1/1362;G03F7/20;H01L21/027 主分类号 C23F1/00
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