发明名称 |
Purging system and purging method for the interior of a portable type hermetically sealed container |
摘要 |
A fine pressure fluctuation at short time intervals occurring when a portable type hermetically sealed container is purged is reduced to thereby prevent the deterioration or the like of a seal member due to the pressure fluctuation. In order to achieve this object, a gas flow rate regulating apparatus is disposed in a gas supplying system in a purging system, and pressure in the portable type hermetically sealed container during purge is measured and the result thereof is fed back to thereby control the flow rate of a supplied gas.
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申请公布号 |
US7360346(B2) |
申请公布日期 |
2008.04.22 |
申请号 |
US20040948223 |
申请日期 |
2004.09.24 |
申请人 |
TDK CORPORATION |
发明人 |
MIYAJIMA TOSHIHIKO;KAGAYA TAKESHI;SUZUKI HITOSHI;SASAKI MUTSUO |
分类号 |
B65B31/02;H01L21/677;B65B31/04;H01L21/00;H01L21/673 |
主分类号 |
B65B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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