发明名称 Polymer bulk acoustic resonator
摘要 A polymer bulk acoustic resonator that includes an active semiconductor layer, a first thin film electrode layer applied to the semiconductor layer, a thin film electro-active polymer layer applied to the first thin film electrode layer; and a second thin film electrode layer applied to the thin film electro-active polymer layer.
申请公布号 US7362035(B2) 申请公布日期 2008.04.22
申请号 US20060381551 申请日期 2006.05.04
申请人 THE PENN STATE RESEARCH FOUNDATION 发明人 JANG SEI-JOO;ZANG QIMING
分类号 H03H9/02 主分类号 H03H9/02
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