Pressure sensor device including a diaphragm and a stopper member having a curved surface facing the diaphragm

摘要

The pressure sensor device has a laminated diaphragm ( 12 ) in which a strain resistance gauge is formed in a surface and a stopper member ( 13 ) including a concave portion forming a curved surface parallel to a surface formed by displacement of the diaphragm, the concave portion being disposed to face the diaphragm. Specifically, the concave portion of the stopper member is formed into a curved surface in which depth y at a distance x from the center of the diaphragm is expressed by a quartic function [y=pr⁴(1-x²/r²)²/64D] in relation to the operating pressure for protection against maximum pressure p when the diaphragm has a radius of r, a thickness of t, and a flexural rigidity of D.