COUPLER AND APPARATUS FOR SEMICONDUCTOR PROCESSING HAVING SAME

摘要

A coupler is provided to avoid slip, noise, friction or damage caused by formation of a void by including a structure in which a void is not formed in the assembly structure of a coupler. A driving axis of a driving part for generating rotation force is connected to a following axis that receives the rotation force of the driving part to rotate by a coupler(600). A first coupler member(610) is fixed to the driving axis to rotate with the driving axis. A second coupler member(620) is fixed to the following axis to rotate with the following axis. A coupling(630) transfers the rotation force of the driving part to the following axis, connecting the first coupler member to the second coupler member. The coupling avoids the vertical movement of the coupler, inserted into one or both of the first and second coupler members in the axis direction of the rotation and in the vertical direction. The coupling can be an insertion groove into which a coupling protrusion formed in at least one of the first or second coupler member is inserted in the axial direction of rotation and in the vertical direction.