| 摘要 |
An alignment device for vacuum deposition, having a substrate holder (11) held above a mask, the substrate holder (11) being held in a vacuum container (3) by a suspension member (12) inserted through a through-hole (1b) formed in a plate (1a) for installation that is an upper wall surface of the vacuum container; a plate (13) for connection, provided outside the vacuum container and connected to the suspension member; a position adjustment device (14) capable adjusting the position relative to the mask of a substrate (5) in a deposition chamber (2) by moving the plate for connection; an extendable tubular shielding member (15) fitted over the suspension member and provided between the outer periphery of the through-hole (1b) in the plate for installation and the plate for connection, shielding between the vacuum side and the atmosphere side; and an urging device (16) for generating urging force in the direction reverse to that of pressing force that is generated by the inside of the tubular member being vacuum and is applied to the plate for connection.
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