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发明名称
Method of manufacturing a semiconductor device
摘要
申请公布号
KR100823712(B1)
申请公布日期
2008.04.21
申请号
KR20060068423
申请日期
2006.07.21
申请人
发明人
分类号
H01L21/336
主分类号
H01L21/336
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代理人
主权项
地址
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