发明名称 METHOD FOR MANUFACTURING IMAGE SENSOR
摘要 A method for manufacturing an image sensor is provided to prevent a micro lens and a color filter from being damaged by using a protective layer when a back grinding is performed on a rear surface of a substrate. Plural wirings and a dielectric layer are formed on a substrate with a photodiode. A color filter is formed on the dielectric layer, and then a micro lens is formed on the color filter(S101). A protection layer is applied on the micro lens and the color filter to have a predetermined thickness(S103). A back grinding process is performed on a rear surface of the substrate(S105), and then a sawing process is performed on the substrate is to package an image sensor(S107). The protection layer is made of polymeric elastomer.
申请公布号 KR100823841(B1) 申请公布日期 2008.04.21
申请号 KR20060132231 申请日期 2006.12.21
申请人 DONGBU ELECTRONICS CO., LTD. 发明人 KIM, SANG SIK
分类号 H01L27/146 主分类号 H01L27/146
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