DEVICE FOR MEASURING SEMICONDUCTOR DISTORTION, METHOD FOR MEASURING DISTORTION, PRESSURE SENSOR, AND ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To prevent a leak current flowing from a piezoresistance element to a semiconductor layer. SOLUTION: A device for measuring semiconductor distortion includes: an electrically floating deformation part 16a composed of an n-type semiconductor by deforming to receive external force to be measured; a plurality of piezoresistance elements R1-R4changed by size of electric resistors in response to a deformation amount of the deformation part by being formed in the deformation part as a p-type part; and guard rings G1-G4surrounding the circumference of the piezoresistance elements as an n+ type region. The device applies a voltage having a larger absolute value than an application voltage on the deformation part through the guard rings by having the same sign as the application voltage to the piezoresistance elements. COPYRIGHT: (C)2008,JPO&INPIT