| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for generating schedule of a substrate processor capable of improving throughput of substrate processes through reduction of useless waiting time by flexible arrangement of periodical liquid exchange processes. SOLUTION: A controller arranges a periodical liquid exchange process XL to a resource of a processor at the timing t1 where a life time LT elapses. Thereafter, if a waiting time is generated in the subsequent processing step d for arrangement of the periodical liquid exchange process XL, the periodical liquid exchange process XL is delayed within the extended time ET and the processing step d that is naturally considered as subsequent step of the periodical liquid exchange process XL is preferentially arranged in the preceding stage. As explained above, since the periodical liquid exchange process XL is not uniformly arranged only on the basis of time-up of the life time LT but is flexibly arranged, useless waiting time can be reduced and thereby throughput of the substrate process can be improved. COPYRIGHT: (C)2008,JPO&INPIT
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