| 摘要 |
PROBLEM TO BE SOLVED: To speedily and accurately measure a deflection characteristic of a mirror system constituted so that the tilting of its mirror plane can be varied. SOLUTION: This measuring device comprises a light source 14 for measurement for irradiating the mirror plane 11 with measuring light 28, a projection section 17 to which the reflected light 13 formed as a projection light point by reflecting measurement light 28 emitted from the light source 14 for measurement on the mirror plane 11 is projected, an imaging section 18 for imaging the projection section 17 to which the reflected light 13 is projected as the projection light point, a control section 31 for controlling the tilting of the mirror plane 11, and a measuring section 33 for measuring the travel amount of the projection light point moving with variation of the tilting of the mirror plane 11 controlled by the control section 31 based on the image of the projection section 17 imaged by the imaging section 18. COPYRIGHT: (C)2008,JPO&INPIT
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