ARRANGEMENT FOR MEASURING A RATE OF ROTATION USING A VIBRATION SENSOR

摘要

The invention relates to an arrangement for measuring a rate of rotation using a vibration sensor, the vibration of said sensor being excited and measured by means of capacitive drive elements, and the rotation of said sensor in an axis, excited by a rotation in another axis by means of the Coriolis force, being measured by means of capacitive measuring elements. Excitation voltages can be supplied to the fixed electrodes of the drive elements, the frequency of said voltages corresponding to the resonance frequency or the subharmonic of the resonance frequency of the vibration sensor. An alternating voltage having a first measuring frequency which is higher than the excitation frequency can be supplied to capacitive elements for measuring the excited vibration. Alternating voltages having a second measuring frequency which is different from the first measuring frequency and higher than the excitation frequency are supplied to the fixed electrodes of the measuring elements, and/or an excitation voltage can be supplied to drive elements causing a vibration excitation in a direction on the basis of the excitation voltage, said excitation voltage being in antiphase with the excitation voltage supplied to other drive elements causing an excitation in the other direction.