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发明名称
Beidseitig mikrostrukturierter, ortsempfindlicher Detektor
摘要
申请公布号
DE10128654(B4)
申请公布日期
2008.04.10
申请号
DE20011028654
申请日期
2001.06.15
申请人
FORSCHUNGSZENTRUM JUELICH GMBH
发明人
PROTIC, DAVOR;KRINGS, THOMAS;SCHLEICHERT, RALF
分类号
G01T1/24;H01L31/117;G01T1/29;H01L27/00;H01L27/14;H01L27/144;H01L27/146;H01L31/0288;H01L31/10;H01L31/105;H01L31/115;H01L31/16;H01L31/18
主分类号
G01T1/24
代理机构
代理人
主权项
地址
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