发明名称 PHOTOSENSITIVE RESIN COMPOSITION AND CURED FILM
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive resin composition capable of being applied in a large film thickness, capable of obtaining a cured product of high resolution and suitable for a surface protective film, an interlayer dielectric and an insulation film for a high density mounted substrate. <P>SOLUTION: The photosensitive resin composition comprises (A) a polyimide resin, (B) a resin having a phenolic hydroxyl group, (C) a photoacid generator and (D) a crosslinking agent. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008083359(A) 申请公布日期 2008.04.10
申请号 JP20060262803 申请日期 2006.09.27
申请人 JSR CORP 发明人 CHIBA TAKASHI;SAITO AKIO;ASANO SHIGETO;ITO JUNJI
分类号 G03F7/038;G03F7/004;G03F7/033;G03F7/037;H01L21/027 主分类号 G03F7/038
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