| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an insulated flange connection structure to be able to connect two vacuum containers by insulating and separating, which highly vacuumizes a charged particle generating device and reduce electromagnetic noise so as to realize a high performance. <P>SOLUTION: The insulated flange connection structure 10 comprises a set of flanges 11, consisting of a first flange 11a and a second flange 11b made of stainless steel, for example, an annular gasket 12 made of an insulated resin, similarly an annular insulated spacer 13, a connection bolt 14 coated with an insulating coating 22, a nut 15, and an insulated washer 16. Therein, both sides of a gasket 12 are elastically deformed and cut into a knife edge 19 so as to capture a seal. Vacuum containers 17a and 17b connected to a set of the flanges 11 are perfectly insulated and separated by the gasket 12, the insulated spacer 13 or the insulating coating 22. <P>COPYRIGHT: (C)2008,JPO&INPIT |
