| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To protect a substrate against damage by preventing interference between a substrate holding plate and a lifter pin even if conveyance precision of a conveyance mechanism in substrate processing equipment falls off with time. <P>SOLUTION: The substrate processing equipment comprises a chamber 24 for processing a substrate 16, a stage 37 for mounting a substrate to be processed provided in the processing chamber, a substrate carrier 35 for carrying the substrate while mounting on substrate holding plates 14 and 15 in the processing chamber and carrying the substrate out from the processing chamber, and a substrate elevating/lowering mechanism 38 having an elevating/lowering rod 4 for delivering the substrate between the substrate carrier and the substrate mounting stage and having a lifter pin 65 provided at the upper end of the rod 4 wherein the lifter pin 65 has a substrate supporting surface 68 for mounting the substrate and a counterbore surface 69 contiguous to the substrate supporting surface 68. The upper surface of the lifter pin 65, the counterbore surface 69 and the substrate supporting surface 68 are formed lower one by one. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
