| 摘要 |
PROBLEM TO BE SOLVED: To provide a SQUID microscope which enhances space resolution, without bringing a sample into contact with a probe. SOLUTION: The SQUID microscope unit 1 is provided with: a SQUID microscope part 2; and a laser microscope part 3 arranged adjacently thereto, and the laser microscope part 3 controls a distance between the sample 4 to be measured by the SQUID microscope part and a tip of the probe 22 of the SQUID microscope part. The high resolution of 1/10-1/100, i.e. sub-μm, compared with that in a conventional SQUID microscope, is obtained noncontactly because controlling the distance between the sample 4 and the tip of the probe 22 by the laser microscope part 3 of deep depth of focus. COPYRIGHT: (C)2008,JPO&INPIT
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