SPIRAL BRUSH FOR CLEANING AND CONVEYING A SUBSTRATE

摘要

Scrubbing apparatus is configured by methods so that discs are quickly cleaned and conveyed by selecting a total number of spiral brush segments, rates of brush rotation, and a pitch length of a helical junction that receives discs for cleaning and transport. A time period for cleaning and transporting discs depends on the pitch length, rotational speed and configurations of the segments. An increase of the cleaning time period may result from use of an increased number of brush segments. A group of discs is cleaned by the same spiral brush, by one-by-one insertion of the discs into the junctions, and transporting the discs through the same segments.