| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sliding member realizing high adhesion of diamond-like carbon to the sliding member and exhibiting low friction property. <P>SOLUTION: An interlayer 6 comprising a chromium layer is formed on a substrate 5 and a DLC multilayered film 10 comprising diamond-like carbon is formed on the interlayer 6 by the UBM sputtering method (Unbalanced Magnetron sputtering process), and, in the DLC multilayered film 10, by forming an inclined layer 12 and a laminated structure layer 11 in which high hardness layer and low hardness layer have a cyclic structure from the inclined layer 12 side, the adhesion of the diamond-like carbon layer to the sliding member is increased and the coefficient of friction is decreased, to achieve excellent sliding property. <P>COPYRIGHT: (C)2008,JPO&INPIT |
