| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flow sensor which performs measurement with high detection sensitivity without being damaged by a shearing force of fluid to be measured, when measuring a flow velocity and a flow rate of the fluid flowing in a fluid channel, equipped with channel forming members forming the fluid channel such as a microchannel. <P>SOLUTION: The thermal flow sensor is equipped with: the channel forming members 10, 12 forming the fluid channel 15 for circulating the fluid inside; and a metal wiring film 31 for a heating body formed by having upper and lower surfaces approximately parallel to an inner wall surface on the inner wall surface enclosing the fluid channel 15, and is characterized by interposing a porous film 20 between the metal wiring film 31 for the heating body and the inner wall surface 11 of the fluid channel 15. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
