| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrode substrate having electrodes patterned and formed on both surfaces in good yield through simple stages. <P>SOLUTION: The method of manufacturing the electrode substrate having a plurality of first electrodes and a plurality of second electrodes patterned and formed on a first surface and a second surface forming the top and reverse surfaces of the substrate, includes: a stage ST01 of forming a polycrystalline ITO film on the first surface of the substrate; a stage ST04 of forming an amorphous ITO film on the second surface; a stage ST05 of forming the second electrodes on the second surface by patterning the amorphous ITO film by using an etching solution selectively removing the amorphous ITO film; a stage ST8 of forming a protective film covering the second electrodes; and a stage ST09 of forming the first electrodes by patterning the polycrystalline ITO film on the first surface. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
