| 摘要 |
A description is given of a method for preparing a device (1) for working material by creating optical apertures in or on an object (18), which device has a variable, three-dimensionally acting focus adjusting means (6, 11) for focusing pulsed working laser radiation (4) on different locations in or on the object (18), wherein a contact element (19), which is transparent to the working laser radiation (4), is to be placed on the object (18) and has on its side to be placed on the object (18) a curved contact surface (20) of a pre-known form, is fastened on the device, the position of the contact surface (20) with respect to the focus adjusting means (6, 11) is determined before the working of the object (18) by means of radiating laser radiation (4) onto the contact surface, in that measuring laser radiation (4) is focused near or on the contact surface (20) by means of the variable focus adjusting means (6, 11), wherein the energy density of the focused measuring laser radiation (3) is too low to produce an optical aperture, and the focused position of the measuring laser radiation (4) is adjusted in a measuring surface (23), which intersects the expected position of the contact surface (20), wherein radiation scattered back or reflected back from the focus of the measuring laser radiation (4) is detected confocally, the position of intersection points (26) between the measuring surface (23) and the contact surface (20) are determined from the confocally detected radiation and the assigned setting of the variable focus adjusting means (6, 11), wherein, if necessary, the above step is repeated a number of times with a changed, in particular displaced, measuring surface (23) until a certain number of intersection points (26), preferably five, have been detected and the position of the contact surface (20) is determined from the position of the intersection points (26) and the pre-known form of the contact surface (20). |
