| 摘要 |
A piezoelectric actuator is described as including a vibration plate in which grooves associated with respective pressure chambers are formed on a surface of the vibration plate, and a piezoelectric layer on the surface of the vibration plate on an opposite side of a channel unit. Since grooves corresponding to the grooves in the vibration plate are formed also in the piezoelectric layer, it is possible to reduce a cross talk between operating sections of the piezoelectric layer. Further, chips and cracks are hardly developed in the piezoelectric layer. |
