| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating gyroscope equipped with a six-leg type vibrator which can perform fault diagnosis of a vibrator in which a sufficiently wide area is allocated to a diagnostic electrode and allocation areas for electrodes other than the diagnostic electrode such as a drive electrode are not affected. <P>SOLUTION: A non-excitation drive central leg 5c of a six-leg type tuning-fork type piezoelectric vibrator 1 does not vibrate when the vibrator 1 is normal. But, when a fault such as a crack occurs in one of a pair of drive electrodes, the in-plane vibration of the pair of drive electrodes becomes imbalanced, causing the central leg 5c to vibrate. The magnitude of the vibration of the central leg 5c represents the degree of imbalance of the in-plane vibration of the pair of drive electrodes, and besides the degree of the fault. The central leg 5c is provided with diagnostic electrodes 16a, 16b, 16c, 16d. Voltage caused by a piezoelectric effect is taken to detect the magnitude of the vibration of the central leg 5c, thereby allowing to perform fault diagnosis. <P>COPYRIGHT: (C)2008,JPO&INPIT |
