| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of calculating equivalent series resistance of a matching network using variable impedance analysis and an embodiment of the matching network analyzed using the same. <P>SOLUTION: In one embodiment, a method of calculating the equivalent series resistances of a matching network includes connecting the matching network to a load, measuring an output of the matching network over a range of load impedances, and calculating the equivalent series resistances of the matching network based upon a relationship between the measured output and the load resistance. The load may be a surrogate load or may be a plasma formed in a process chamber. <P>COPYRIGHT: (C)2008,JPO&INPIT |
