| 摘要 |
A variable shape mirror is composed of a substrate, a lower electrode film which is disposed on the substrate, a piezoelectric film which is disposed on the lower electrode film, an upper electrode film which is disposed on the piezoelectric film, an insulating film which is disposed on the upper electrode film, and a mirror film which is disposed on the insulating film. The lower electrode film, the piezoelectric film, and the upper electrode film function as a driving portion to deform the mirror film. The upper electrode film is divided into a plurality of divided electrodes and the driving portion includes a part which performs main deformation of the mirror film and a part which performs fine adjustment of deformation of the mirror film.
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