发明名称 SUBSTRATE TRANSFER SYSTEM
摘要 <p>Provided is a substrate assorting system (1) for assorting a plurality of substrates (W) housed in an assorting source cassette (3), into assorting cassettes (5). The substrate assorting system (1) comprises a buffer station (7) capable of housing the substrates (W) in arbitrary positions, and a loader device (11) for transferring the substrates (W) in sheets between the individual cassettes (3, 5) and the buffer station (7).</p>
申请公布号 WO2008041326(A1) 申请公布日期 2008.04.10
申请号 WO2006JP319792 申请日期 2006.10.03
申请人 IHI CORPORATION;HIRATA, KENSUKE;MURAYAMA, SUSUMU;TO, KUNIAKI;TANAKA, KAI;UEDA, WATARU 发明人 HIRATA, KENSUKE;MURAYAMA, SUSUMU;TO, KUNIAKI;TANAKA, KAI;UEDA, WATARU
分类号 B07C5/36;B65G1/00 主分类号 B07C5/36
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