Verfahren zur Abscheidung von Atomschichten aus Metallen,申请号DE20036018173T-传众专利搜索

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发明名称	Verfahren zur Abscheidung von Atomschichten aus Metallen
摘要
申请公布号	DE60318173(T2)	申请公布日期	2008.04.10
申请号	DE20036018173T	申请日期	2003.11.04
申请人	AIR PRODUCTS AND CHEMICALS INC.	发明人	NORMAN, JOHN ANTHONY THOMAS;ROBERTS, DAVID ALLEN;BOZE, MELANIE ANNE
分类号	C23C16/14;C23C10/60;C23C16/08;C23C16/18;C23C16/30;C23C16/56;C23C26/00;C30B25/00;H01L21/285;H01L21/768	主分类号	C23C16/14
代理机构		代理人
主权项
地址

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