发明名称 METHOD FOR PRODUCING BONDED MATERIAL OF TANTALUM AND CARBON, GRADIENT COMPOSITION STRUCTURE OF TANTALUM AND CARBON, METHOD FOR PRODUCING TANTALUM TUBE AND PIT CARBON CORE, TANTALUM TUBE AND PIT CARBON CORE, METHOD FOR PRODUCING TANTALUM CARBIDE WIRE, AND TANTALUM CARBIDE WIRE
摘要 <P>PROBLEM TO BE SOLVED: To bond tantalum of a predetermined shape and carbon by solid phase diffusion welding and form carbide on the surface of tantalum other than the portion where tantalum and carbon are subjected to solid phase diffusion welding by a simple method. <P>SOLUTION: Tantalum or a tantalum alloy and a carbon substrate are placed in a vacuum heat treatment furnace, heat-treated under such a condition that Ta<SB>2</SB>O<SB>5</SB>being a naturally oxidized film to be formed on the surface of tantalum or the tantalum alloy sublimes and further heat-treated after the Ta<SB>2</SB>O<SB>5</SB>is removed while introducing a carbon source into the vacuum heat treatment furnace. As a result, the surface of tantalum or the tantalum alloy is bonded to the surface of the carbon substrate by solid phase diffusion welding and simultaneously the carbide is formed on the surface of tantalum other than the portion where tantalum and carbon are subjected to solid phase diffusion welding. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008081362(A) 申请公布日期 2008.04.10
申请号 JP20060263429 申请日期 2006.09.27
申请人 KWANSEI GAKUIN 发明人 KANEKO TADAAKI
分类号 C04B37/02;B23K20/00;C01B31/30;C23C8/64;H01L21/28;H01L21/3205;H01L23/52 主分类号 C04B37/02
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