发明名称 COPPER ALLOY BONDING WIRE FOR SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a copper-based bonding wire for semiconductor device which has a reduced material cost, is excellent in a ball bonding shape, wire bonding property etc., and has a good loop formability, and a superior mass productivity. <P>SOLUTION: The copper alloy bonding wire for a semiconductor device contains at least one kind of Mg and P in total of 10 to 700 mass ppm, and having a dense layer containing the total density of Mg and P of ten or more times the containing density on the surface of the wire. <P>COPYRIGHT: (C)2008,JPO&INPIT
申请公布号 JP2008085319(A) 申请公布日期 2008.04.10
申请号 JP20070224285 申请日期 2007.08.30
申请人 NIPPON STEEL MATERIALS CO LTD;NITTETSU MICRO METAL:KK 发明人 UNO TOMOHIRO;KIMURA KEIICHI;YAMADA TAKASHI
分类号 H01L21/60 主分类号 H01L21/60
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