METHOD OF EVALUATING SURFACE ROUGHNESS AND ITS EVALUATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a method of evaluating surface roughness and its evaluation device capable of performing in-process evaluation of surface roughness having surface roughness of the order of a fewμm to a few hundreds ofμm by using ultrasonic scattering. SOLUTION: The method of evaluating surface roughness comprises: transmitting a pulsed ultrasound 12 to a surface 10 of an evaluation object; detecting a coherent component of a pulsed ultrasound 15 reflected on the surface 10; and determining roughness height of the surface 10 of the evaluation object by an optimization technique from a value normalized by dividing the strength of the coherent component by the strength of a coherent component in the specular reflection and a frequency f of the pulsed ultrasound. COPYRIGHT: (C)2008,JPO&INPIT