| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic bearing device capable of improving durability of a rolling bearing against a load of a thrust load and accurately controlling a magnetic bearing. SOLUTION: This magnetic bearing device uses both rolling bearings 15, 16 and the magnetic bearing. The rolling bearings 15, 16 support a radial load, and the magnetic bearing supports either or both of an axial load and a bearing preload. An electromagnet 17 constituting the magnetic bearing is controlled by a controller 19 according to an output from a force detecting sensor unit 18 for detecting the force of a main shaft 13 in the axial direction. The force detection sensor unit 18 comprises: a pair of ring-shaped sensor targets 31, 32 sandwiching both end faces of an outer ring 16b of the rolling bearing 16; a pair of plate springs 33, 34 supporting each of the sensor targets 31, 32; and a gap sensor 35 for detecting a gap with respect to the sensor targets 31, 32. COPYRIGHT: (C)2008,JPO&INPIT
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