| 摘要 |
PROBLEM TO BE SOLVED: To provide an appearance inspecting apparatus which accurately inspects the whole surface of an inspection object even when a tapered section exists on the outer peripheral surface of a cylindrical inspection object. SOLUTION: The appearance inspecting apparatus comprises: a workpiece support member 3 for supporting the cylindrical inspection object having the tapered section on the outer peripheral surface; a rotating mechanism 65 for rotating the workpiece support member 3 in the circumferential direction of the cylinder; a coaxial epi-illumination device 61; a ring illumination device 62; a first CCD camera 63 having an optical axis on the axial center of the inspection object; a second CCD camera 64 having an optical axis orthogonal to the axial center and facing a side surface of the inspection object; and a controller 100. The controller 100 controls each apparatus so that the axial end surface of the inspection object is imaged by the first CCD camera 63 while the coaxial epi-illumination device 61 emits light, the tapered section of the inspection object is imaged by the first CCD camera 63 while the ring illumination device 62 emits light, and the workpiece support member 3 is intermittently rotated by the rotating mechanism 65 and the side surface of the inspection object is imaged by the second CCD camera 64, while the ring illumination device 62 emits light. COPYRIGHT: (C)2008,JPO&INPIT
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