| 摘要 |
PROBLEM TO BE SOLVED: To achieve the miniaturization of a substrate inspection device while shortening a scanning distance required in inspection to shorten an inspection time. SOLUTION: The substrate inspection device is equipped with a stage 1 for supporting a substrate A being an inspection target, a plurality of gate shaped arms 3A and 3B provided so as to leave an interval in the feed direction of the substrate A so as to straddle the substrate A on the stage and the inspection parts 5 respectively provided to a plurality of the gate shaped arms to inspect the substrate A. The substrate A is relatively moved with respect to the gate shaped arms arranged in a spaced-apart state. At this time, the total length of the substrate inspection device may be 1.5 times the length of the substrate A. Further, the scanning distance is set to about 1/2 the total length of the substrate A and the inspection time can be shortened. COPYRIGHT: (C)2008,JPO&INPIT
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