| 摘要 |
PROBLEM TO BE SOLVED: To reduce weight, while maintaining high sealability and high vacuum property, in a vacuum chamber. SOLUTION: This vacuum chamber has a chamber body 10 composed of a wall member 13 and having an opening 13a, and a cover member 20 capable of blocking up the opening 13a. Among the wall member 13 and the cover member 20, at least one has a honeycomb structural material 30 having a wall 30b extended in the inside-outside direction of the chamber body 10 and a cavity part 30a partitioned by this wall 30b, and has plate members 31 and 32 covering an inner surface and an outside surface of the chamber body 10 among surfaces of the honeycomb structural material 30. COPYRIGHT: (C)2008,JPO&INPIT
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