| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an infrared gas analyzer and an output compensation method therefor, which perform highly-accurate measurement operation by removing an influence of external vibration applied to the infrared gas analyzer. <P>SOLUTION: The analyzer has first and second thermal flow sensors and a compensation part on a gas circulation passage of a detector. The compensation part has: a first operation part for determining a flow component generated near the thermal flow sensors by vibration; a second operation part which has a function showing a relation between the flow component and the vibration applied to the infrared gas analyzer, and estimates the magnitude of the vibration applied to the infrared gas analyzer from the output from the first operation part; a third operation part which has a function showing a relation between the vibration applied to the infrared gas analyzer and the flow component over the whole gas circulation passage generated by the vibration, and determines the flow component over the whole gas circulation passage from the magnitude of the vibration estimated by the second operation part; and a fourth operation part for correcting the difference of each output signal from the thermal flow sensors by utilizing the output from the third operation part. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
