| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing apparatus and method for processing a plurality of works simultaneously with high throughput at a low cost. SOLUTION: The dicing apparatus comprises a work table 2 provided with surfaces 11 and 12 for holding a work in parallel, a processing section 5 opposing the holding surface 11, a processing section 6 opposing the holding surface 12, a shaft 3 for moving the processing section 5 and the holding surface 11 relatively, and a shaft 4 for moving the processing section 6 and the holding surface 12 relatively. When the works W are suction held to the opposite sides of the work table 2 and processed, the number of works to be processed can be doubled using an apparatus having a work table of the same diameter and thereby the throughput can be enhanced. COPYRIGHT: (C)2008,JPO&INPIT |
