| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibration element with excellent noise immunity characteristics and its manufacturing method capable of suppressing variation in the output characteristics which is caused by electrification of the element in a dicing process. <P>SOLUTION: The vibration element includes a stack of a lower electrode film 4 (a first electrode layer), a piezoelectric film 5 (a piezoelectric layer), and an upper electrode film 6 (a second electrode layer) in that order on an opposite side of a vibrator part from the substrate, and is formed with a wiring film 9 (a wiring pattern layer) connecting between a plurality of terminals and the lower electrode film 4 and the upper electrode film 6 (6a, 6b, 6c) respectively on a mounting surface of the base part, wherein, the lower electrode film 4 is formed throughout the opposite side of the vibrator part from the substrate and the mounting surface of the base part, and the wiring film 9 is formed in a formation area of the lower electrode film 4. <P>COPYRIGHT: (C)2008,JPO&INPIT |
