| 摘要 |
<P>PROBLEM TO BE SOLVED: To enhance the dimensions accuracy of an outer contour of a vibration reed during manufacturing the vibration reed in which a groove part is formed. <P>SOLUTION: This method for manufacturing the vibration reed in which a groove part is formed is a method for forming a metal film on a base and formed an external form and the groove part of the vibration reed by etching the base with the metal film as a mask and is provided with a metal film formation step for forming two metal films to one vibration reed while making the metal films face each other and forming the metal films on the base, wherein outer edge parts of the both metal films correspond to the external shape of the vibration reed and facing inner edge parts respectively correspond to edge parts of the groove part of the vibration reed, and an etching step for using the metal films to perform etching. The etching step includes a first etching step for etching the base by each edge part outside the two facing metal films to form the external form of a vibration reed, and a second step for etching the base by each edge part inside the two facing metal films to form the groove part of the vibration reed. <P>COPYRIGHT: (C)2008,JPO&INPIT |
