| 摘要 |
PROBLEM TO BE SOLVED: To accurately inspect and measure an oriented film, etc. of a liquid crystal display, including its optical substance characteristics, its surface shape, and the existence of deposits on its surface. SOLUTION: With a thin film used as a measuring object specimen, light coming out of the same light source is split into object illumination light 11 and reference light 12 in two directions by a light splitting means (half mirror 5) to obliquely illuminate the surface of the specimen 30 by the illumination light 11. The optical characteristics of the specimen is measured through optical interference caused by superposing object reflection light 11a and the reference light 12 on each other by a light superposition means (half mirror 5), with the reflection light 11a arising on the specimen surface and in the vicinity of the surface. A two-dimensional light intensity detector (array CCD 7), etc. are used for detecting a change in light intensity. The optical substance characteristics and the surface state of the specimen surface and those in the vicinity of the surface are measured through a change in light intensity caused by the optical interference between the reflection light arising on the specimen surface and the reference light. COPYRIGHT: (C)2008,JPO&INPIT
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